|Table of Contents|

Investigation of microvalve based on microelectromechanical systems(PDF)

《火箭推进》[ISSN:1672-9374/CN:CN 61-1436/V]

Issue:
2010年01期
Page:
8-12
Research Field:
研究与设计
Publishing date:

Info

Title:
Investigation of microvalve based on microelectromechanical systems
Author(s):
Zhang Xizhe1;  Tang Zhouqiang1;  Han Xianwei1;  Guan Haibing2;  Huan Fei2
1 Xi'an Aerospace Propulsion Institute, Xi'an 710100；
Keywords:
-
PACS:
V432
DOI:
-
Abstract:
According to the status and development trend of MEMS and microvavle technology, the concepts of staticelectricity and piezoelectricity microvavle have been demonstrated by the theoretical analyzing and numerical simulation based on the actuating analysis and performance comparison of the microvalve. The major technical and performance parameters have been determined. The prototype of the piezoelectricity microvalve was fabricated followed the structure design and MEMS technics research. Performance of the prototype has been tested. The result shows that the design of the MEMS piezoelectricity microvalve is reasonable, and the microvalve with high performance would be obtained through fabrication optimization and MEMS technics study.

References:

[1]Blandino J, Mueller J, Bame D, and Green A. Charac-terization of Dry out Point in the Vaporizing Liquid Microthruster [C]. AIAA-2003-4719, 2003. [2]Yang X, Grosjean C, Tai Y C, Design, Fabrication, and Testing of Micromachined Silicon Rubber Membrane Valve [J]. Journal of MEMS, 1999, 8(4): 393-402. [3]白韶红, 微型阀和微型泵的原理与应用 [J]. 传感器世界.2000(4): 2-4. [4]格雷戈里 T A, 科瓦奇. 微传感器与微执行器全书 [M]. 北京: 科学出版社, 2003. [5]徐泰然. MEMS和微系统－设计与制造[M]. 北京: 机械工业出版社, 2004.

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Last Update: 1900-01-01