|Table of Contents|

Advance in alloy thin-film pressure sensor for high-temperature environment(PDF)

《火箭推进》[ISSN:1672-9374/CN:CN 61-1436/V]

Issue:
2011年05期
Page:
78-83
Research Field:
测控与试验
Publishing date:

Info

Title:
Advance in alloy thin-film pressure sensor for high-temperature environment
Author(s):
LI Wei;  CHEN Huai-li
Xi’an Aerospace Propulsion Institute, Xi’an 710100, China
Keywords:
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PACS:
V434-34
DOI:
-
Abstract:
The alloy thin-film pressure sensor has overcome the shortcomings of stickup pressure sensor, has more excellent performances and is suitble for harsh environments. The working principle of the alloy thin-film pressure senso is introduced in this paper. The advantages and disadvantages of several pressure sensors are compared. Taking the sensor’s working temperature as an assessment index, the characteristics and development status of nickel-chromium (NiCr), platinum-tungsten (PtW) and palladium-chromium (PdCr) thin-film pressure sensors are elaborated. The conclusions are: NiCr thin-film pressure sensor is suitable for pressure measurement in the range of -269℃~ +350℃; PtW and PdCr thin-film pressure sensors are applied to pressure measurement at high temperature. The key technology and the application of alloy thin-film pressure sensor are reviewed.

References:

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