|Table of Contents|

Effect of deposition temperature on microstructure of SiC coating prepared by CVD process(PDF)

《火箭推进》[ISSN:1672-9374/CN:CN 61-1436/V]

Issue:
2014年04期
Page:
50-56
Research Field:
工艺与材料
Publishing date:

Info

Title:
Effect of deposition temperature on microstructure of SiC coating prepared by CVD process
Author(s):
WANG Yi;  LI Hong-chun;  GUO Chun-feng
Xi’an Aerospace Propulsion Institute, Xi’an 710100, China
Keywords:
chemical vapor deposition;  deposition temperature;  SiC coating;  microtucture
PACS:
V258+.3-34
DOI:
-
Abstract:
The process of preparing the anti-oxidation coatings of SiC on the C/SiC composite by the chemical vapor deposition method at different temperatures is introduced. The phase and microstructure of the SiC coatings prepared in different process conditions were analyzed by SEM, EDS and XRD. The results reveal that the deposition speed of SiC coating and the grain size increase with the raising of temperature. A higher deposition temperature leads to a fast deposition of the SiC coating, but its surface roughness will be exacerbated.

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