航天推进技术研究院主办
[1]王 毅,杨晓辉,白龙腾.基于CFD的CVD布气装置模拟与优化设计[J].火箭推进,2014,40(03):46-51.
WANG Yi,YANG Xiao-hui,BAI Long-teng.Optimization design of gas distributor for CVD reactor by CFD simulation[J].Journal of Rocket Propulsion,2014,40(03):46-51.
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WANG Yi,YANG Xiao-hui,BAI Long-teng.Optimization design of gas distributor for CVD reactor by CFD simulation[J].Journal of Rocket Propulsion,2014,40(03):46-51.
基于CFD的CVD布气装置模拟与优化设计
《火箭推进》[ISSN:1672-9374/CN:CN 61-1436/V]
卷:
40
期数:
2014年03期
页码:
46-51
栏目:
研究与设计
出版日期:
2014-06-27
- Title:
- Optimization design of gas distributor for CVD reactor by CFD simulation
- Keywords:
- CFD; gas distributor; CVD
- 分类号:
- V258+.3-34
- 文献标志码:
- A
- 摘要:
- 采用流体力学有限元模拟方法，对化学气相沉积（CVD）设备系统内流场进行模拟分析，得到平板布气装置中孔径尺寸、孔径分布与预制体局部流场之间的关系，由此优化设计了布气装置，提高了CVD设备布气的均匀性和稳定性。
- Abstract:
- The simulation analysis on flow field in the CVD(chemical vapor deposition) reaction chamber was performed with computational fluid dynamics (CFD) finite element simulation method. The relationship of the pore size and pore distribution of the gas distributor with local flow field in the prefabricated body was obtained, by which the design of the gas distributor was optimized, and the uniformity and stability of the flow field in the reactor were improved.
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备注/Memo
收稿日期：2014-01-21；修回日期：2014-02-28 作者简介：王毅（1981—），男，博士，研究领域为陶瓷基复合材料制备技术
更新日期/Last Update:
1900-01-01