航天推进技术研究院主办
Ning Jianhua.Photoetching diaphragm in burst valve application[J].Journal of Rocket Propulsion,2005,31(01):33-34.
光刻膜片在膜片阀中的应用
- Title:
- Photoetching diaphragm in burst valve application
- 分类号:
- V463
- 文献标志码:
- A
- 摘要:
- 介绍了膜片光刻的工艺原理、工艺过程及其特点,论述了利用双面自对准光刻模具与膜片母材厚度之间的关系控制膜片槽深的机理,介绍了光刻膜片在膜片阀中的应用情况,经爆破试验和发动机热试车表明:膜片阀设计合理,膜片光刻工艺可行。
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